Supplementary process materials are another way Filmtronics supports their valued customers. Like our diffusants and spin-on polymers, our ancillary materials are backed by stringent quality control and leading analytical capabilities. So, whether a simple diluent blend or customized cleaning agent, we always deliver the highest-quality materials to support your processes.

Diluents

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DIL-500F Ultra High Purity Diluent

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Ultra high pure diluent solution used with the 50xF series of spin-on glass products. Allows users to decrease solid content on-site, increasing the achievable range of film thicknesses with a single product. Provides flexibility for development work or can be used as a line rinse solution.

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DIL-X1F Ultra High Purity Diluent

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Ultra high pure diluent solution used with the x1F and x15F series of spin-on glass products. Allows users to decrease solid content on-site, increasing the achievable range of film thicknesses with a single product. Provides flexibility for development work or can be used as a line rinse solution.

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DIL-FG65 Ultra High Purity Diluent

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Ultra high pure diluent solution used with the FG65 and 400F series of spin-on glass products. Allows users to decrease solid content on-site, increasing the achievable range of film thicknesses with a single product. Provides flexibility for development work or can be used as a line rinse solution.

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DIL-ME01 Ultra High Purity Diluent

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Ultra high pure diluent solution used with the PBF series of spin-on diffusant products. Allows users to decrease solid content on-site, increasing the achievable range of film thicknesses with a single product. Provides flexibility for development work or can be used as a line rinse solution.

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Edge Bead Removal / Backside Rinse

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EBR-IP01 Ultra High Purity 2-Propanol

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Used for edge bead removal or backside rinse during spin-coating applications. Works well with the majority of Filmtronics' standard spin-on glass and diffusant products. Can also be used as a dispense line rinse between products.

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EBR-PG01 Ultra High Purity Propylene Glycol Methyl Ether Acetate (PGMEA)

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Alternative solution used for edge bead removal or backside rinse during spin-coating applications. Works well with the majority of Filmtronics' standard spin-on glass and diffusant products. Can also be used as a dispense line rinse between products.

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EBR-EL01 Ultra High Purity Ethyl Lactate

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Alternative solution used for edge bead removal or backside rinse during spin-coating applications. Works well with the majority of Filmtronics' standard spin-on glass and diffusant products. Can also be used as a dispense line rinse between products.

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Cleaning Solutions

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CS-UB01 Copper Cleaner

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Acid salt based cleaner used for post-process cleaning of copper leads.

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The proper fit for your application

Filmtronics offers a wide range of spin-on polymers designed for performance and cost-effectiveness in your critical applications. Manufactured to the highest quality standards and backed by state-of-the-art analytical techniques, our polymers deliver exceptional solutions for:

  • Planarization and gap-fill
  • Low relative permittivity (insulating layers)
  • Masking and barrier layers
  • Passivation coatings
  • Bonding layers
  • Sacrificial and etch selectivity films
  • Anti-reflective coatings

We recognize, however, that “one size fits all” doesn’t always work when it comes to spin-on polymers. With that in mind, Filmtronics has developed industry leading capabilities that allow rapid polymer modification and sampling to provide products with tailored properties to fit your application. Manufactured with the same advanced manufacturing systems and the same focus on quality as our customary products, our customized solutions offer unique opportunities for yield enhancements, cost reductions or performance improvements of your processes. The information on the right highlights some of our most popular products and their characteristics. Not finding a suitable fit with your application? Contact us to discuss a customized solution.

An extensive selection of products to meet your unique application

Filmtronics offers an extensive selection of spin-on diffusant (SOD) formulations to suit the needs of a wide variety of applications. Spin-on diffusants provide an impurity source for semiconductor junction fabrication. Filmtronics spin-on diffusants permit precise control of dopant entering the silicon through application of a homogeneous solution to the substrate. 

Available SOD products include: N-type and P-type for silicon diffusion; lifetime modifiers; and diffusants for compound semiconductor materials. Key advantages of doping with spin-on materials are:

  • Uniform solutions manufactured with statistical process control and advanced analytical technology.
  • Convenient application of dopant with non-hygroscopic solutions.
  • Uniform and consistent doping with high yields.
  • Extended quartz tube life.
  • Simultaneous diffusion of “P” and “N” types and simultaneous diffusion of different concentrations of the same dopant.
  • No storage of source wafers or use of costly ion implant equipment.
  • Does not require use of toxic gases (e.g., POCl3, BBr3, etc.).

Doping agents are widely used in semiconductor, sensor, MEMS and other device manufacturing processes to precisely alter electrical or optical properties. The need for precise and specific property control has led to the need for numerous diffusant materials and methods. Manufactured with a focus on quality and more than 36 years of experience and development, Filmtronics offers a wide variety of SOD products. Use our properties table (at right), or contact us to discuss your specific needs.